| Title: |
Data Efficient Lithography Modeling with Residual Neural Networks and Transfer Learning |
| Article URLs: |
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| Alternative Article URLs: |
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| Authors: |
Yibo Lin |
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University of Texas at Austin
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| Yuki Watanabe |
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Toshiba Memory Corporation
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| Taiki Kimura |
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Toshiba Memory Corporation
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| Tetsuaki Matsunawa |
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Toshiba Memory Corporation
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| Shigeki Nojima |
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Toshiba Memory Corporation
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| Meng Li |
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University of Texas at Austin
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| David Z. Pan |
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University of Texas at Austin
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| Sharing: |
Unknown
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| Verification: |
Authors have
not verified
information
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| Artifact Evaluation Badge: |
none
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| Artifact Correspondence Email Addresses: |
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| NSF Award Numbers: |
unknown
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| DBLP Key: |
conf/ispd/LinWKMN0P18
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| Author Comments: |
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